ACLS / Axcelis Technologies, Inc. - Pengajuan SECLaporan Tahunan, Pernyataan Proksi

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 5, 2025 Axcelis Technologi

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 5, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o

Axcelis Announces Financial Results for Second Quarter 2025

Exhibit 99.1 News Release Axcelis Announces Financial Results for Second Quarter 2025 Q2 Highlights: · Revenue of $194.5 million · GAAP Gross Margin of 44.9%, and Non-GAAP Gross Margin of 45.2% · GAAP Operating Margin of 14.9% and Non-GAAP Operating Margin of 17.7% · GAAP Diluted earnings per share of $0.98, and Non-GAAP Diluted earnings per share of $1.13 BEVERLY, Mass.— August 5, 2025—Axcelis Te

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended June 30, 2025 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000

Filing Fee Table. Filed herewith.

Calculation of Filing Fee Tables S-8 AXCELIS TECHNOLOGIES INC Table 1: Newly Registered Securities Security Type Security Class Title Fee Calculation Rule Amount Registered Proposed Maximum Offering Price Per Unit Maximum Aggregate Offering Price Fee Rate Amount of Registration Fee 1 Equity Common Stock, par value $0.

As filed with the Securities and Exchange Commission on May 29, 2025

As filed with the Securities and Exchange Commission on May 29, 2025 REGISTRATION NO.

Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through May 7, 2025. Incorporated by reference to Exhibit 10.1 of the Registrant’s Form 8-K filed with the Commission on May 8, 2025.

Exhibit 10.1 As approved by the Stockholders on May 7, 2025 AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for the reverse stock split on June 30, 2016; as amended by the Board of Directors on February 15, 2017 (Stockholder approval not required); as approved by the Stockho

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Other Events, Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 7, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 6, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AXCELIS TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter)

OMB APPROVAL OMB Number: 3235-0697 Expires: August 31, 2027 Estimated average burden hours per response.

Axcelis Announces Financial Results for First Quarter 2025

Exhibit 99.1 News Release Axcelis Announces Financial Results for First Quarter 2025 Q1 Highlights: · Revenue of $192.6 million · GAAP Gross Margin of 46.1%, and Non-GAAP Gross Margin of 46.4% · GAAP Operating Margin of 15.1% and Non-GAAP Operating Margin of 18.3% · GAAP Diluted earnings per share of $0.88, and Non-GAAP Diluted earnings per share of $1.04 BEVERLY, Mass.— May 6, 2025—Axcelis Techno

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended March 31, 2025 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 00

Exhibit 1.01 — Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form.

Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2024 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the “Company”). As noted in the Form SD, 48 suppliers that responded to the Company’s reasonable country of origin inquiry survey (representing 21%

HISTORICAL GAAP TO NON-GAAP RECONCILIATION APRIL 21, 2025 2 USE OF NON-GAAP MEASURES This presentation includes financial measures that are not presented in accordance with U.S. generally accepted accounting principles (“Non-GAAP financial measures”)

Exhibit 99.1 HISTORICAL GAAP TO NON-GAAP RECONCILIATION APRIL 21, 2025 2 USE OF NON-GAAP MEASURES This presentation includes financial measures that are not presented in accordance with U.S. generally accepted accounting principles (“Non-GAAP financial measures”). These Non-GAAP financial measures include non-GAAP gross profit, non-GAAP gross margin, non-GAAP operating expenses, non-GAAP operating

Regulation FD Disclosure, Financial Statements and Exhibits

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): April 21, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No.   )

TABLE OF CONTENTS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No.   ) Filed by the Registrant ☒ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (as permitted by Rule

Financial Statements and Exhibits, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): March 12, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o

Axcelis Announces $100 Million Increase to Share Repurchase Authorization

Exhibit 99.1 News Release Axcelis Announces $100 Million Increase to Share Repurchase Authorization BEVERLY, Mass.— Mar. 12, 2025—Axcelis Technologies, Inc. (Nasdaq: ACLS) a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that its Board of Directors has approved an additional $100 million in share repurchase authorization. This approval bring

Subsidiaries of the Company. Filed herewith.

Exhibit 21.1 Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2024 Subsidiaries The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1. Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2. Axcelis Technologies GmbH (Germany) 3. Axceli

Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended by the Board of Directors on November 13, 2024. Filed herewith

‌Exhibit 10.1 AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for the reverse stock split on June 30, 2016; as amended by the Board of Directors on February 15, 2017 (Stockholder approval not required); as approved by the Stockholders on May 16, 2017; as amended by the Board

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2024 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941

Named Executive Officer Base Compensation at February 15, 2025. Filed herewith.

Exhibit 10.8 Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 15, 2025 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the “Company”) and each of: · the Company’s principal executive officer (Russell J. Low), · the Company’s principal financial officer (James G. Coogan), and ● the three most hig

Non-Employee Director Cash Compensation at February 15, 2025. Filed herewith.

Exhibit 10.9 Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 15, 2025 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non-employee directors. Axcelis provides cash retainers to its non-employee directors, as follows: Role Annual Retainers in Effect as of July 1, 202

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 10, 2025 Axcelis Technol

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 10, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employe

Axcelis Announces Financial Results for Fourth Quarter and Full Year 2024

Exhibit 99.1 Axcelis Announces Financial Results for Fourth Quarter and Full Year 2024 Q4 Highlights: · Revenue of $252.4 million · Operating Margin of 21.6% · Diluted earnings per share of $1.54 BEVERLY, Mass.— Feb. 10, 2025—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter and full year ended December 31, 2024. For the full year 2024, the Company

Regulation FD Disclosure

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 10, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended September 30, 2024 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file numbe

Regulation FD Disclosure, Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 6, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

Axcelis Announces Financial Results for Third Quarter 2024

Exhibit 99.1 NEWS RELEASE Axcelis Announces Financial Results for Third Quarter 2024 · Revenue of $256.6 million · Operating margin of 18.3% · Diluted earnings per share of $1.49 BEVERLY, Mass. — Nov. 6, 2024—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the third quarter ended September 30, 2024. The Company reported third quarter revenue of $256.6 million, compa

HISTORICAL BACKLOG CORRECTION NOVEMBER 6, 2024

Exhibit 99.2 HISTORICAL BACKLOG CORRECTION NOVEMBER 6, 2024 2 CORRECTED HISTORICAL BACKLOG (2019 - Q2 2024) June 30, March 31, As of December 31, 2024 2024 2023 2022 2021 2020 2019 (in millions) $879 $973 $1,061 $1,020 $415 $111 $84 Corrected Backlog $994 $1,121 $1,212 $1,125 $461 $116 $99 Previously Reported Backlog $(115) $(149) $(151) $(105) $(46) $(5) $(15) Variance

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended June 30, 2024 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000

Axcelis Announces Financial Results for Second Quarter 2024

Exhibit 99.1 News Release Axcelis Announces Financial Results for Second Quarter 2024 · Revenue of $256.5 million · Operating margin of 20.6% · Diluted earnings per share of $1.55 BEVERLY, Mass. — July 31, 2024—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the second quarter ended June 30, 2024. The Company reported second quarter revenue of $256.5 million, compar

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 31, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 9, 2024 Axcelis Technologies

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 9, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of

Axcelis Announces Preliminary Financial Results for Second Quarter 2024 Ahead of Investor Event

Exhibit 99.1 News Release Axcelis Announces Preliminary Financial Results for Second Quarter 2024 Ahead of Investor Event BEVERLY, Mass., July 9, 2024 - Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today announced preliminary financial results for the second quarter of 2024. The Company now expects revenue to b

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AXCELIS TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter)

OMB APPROVAL OMB Number: 3235-0697 Expires: July 31, 2024 Estimated average burden hours per response.

Exhibit 1.01 — Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form.

Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2023 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the “Company”). As noted in the Form SD, 86 suppliers that responded to the Company’s reasonable country of origin inquiry survey (representing 27%

Certificate of Amendment to the Restated Certificate of Incorporation of the Company filed May 9, 2024. Incorporated by reference to Exhibit 3.1 of the Company’s Form 8-K filed with the Commission on May 9, 2024

Exhibit 3.1 Conformed Copy CERTIFICATE OF AMENDMENT TO RESTATED CERTIFICATE OF INCORPORATION OF AXCELIS TECHNOLOGIES, INC. It is hereby certified that: 1. The name of the corporation (hereinafter called the “Corporation”) is Axcelis Technologies, Inc. The name under which the Corporation was originally incorporated is Eaton Semiconductor Equipment Inc. The Corporation’s original Certificate of Inc

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Other Events, Submission of Matters to a Vote of Security Holders, Amendments to Articles of Incorporation or Bylaws; Change in Fiscal Year

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 9, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended March 31, 2024 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 00

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 1, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i

Axcelis Announces Financial Results for First Quarter 2024 Revenue, Gross Margin and EPS Beat Guidance

Exhibit 99.1 News Release Axcelis Announces Financial Results for First Quarter 2024 Revenue, Gross Margin and EPS Beat Guidance BEVERLY, Mass. — May 1, 2024—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the first quarter ended March 31, 2024. The Company reported first quarter revenue of $252.4 million, compared to $310.3 million for the fourth quarter of 2023. G

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No.   )

TABLE OF CONTENTS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No.   ) Filed by the Registrant ☒ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (as permitted by Rule

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No.   )

TABLE OF CONTENTS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No.   ) Filed by the Registrant ☒ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☒ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (as permitted by Rule

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 28, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employe

AXCELIS STRENGTHENS ITS BOARD WITH THE ELECTION OF TWO DIRECTORS

Exhibit 99.1 News Release AXCELIS STRENGTHENS ITS BOARD WITH THE ELECTION OF TWO DIRECTORS BEVERLY, Mass., Feb. 28, 2024 - Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that Gregory Graves and Necip Sayiner have been elected to the Company’s Board of Directors. “We are pleased to welcome Gregory

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K/A (Amendment No. 1)

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K/A (Amendment No. 1) (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2023 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-3094

Non-Employee Director Cash Compensation at February 15, 2024. Filed herewith.

Exhibit 10.9 Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 15, 2024 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non-employee directors. Axcelis provides cash retainers to its non-employee directors, as follows: Annual Cash Retainers, paid quarterly in advance

Named Executive Officer Base Compensation at February 15, 2024. Filed herewith.

Exhibit 10.8 Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 15, 2024 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the “Company”) and each of: · the Company’s principal executive officer (Russell J. Low), · the Company’s principal financial officer (James G. Coogan), and ● the three most hig

Executive Compensation Clawback Policy, as adopted by the Board of Directors on August 10, 2023. Filed herewith

‌Exhibit 10.14 Axcelis Technologies, Inc. Executive Compensation Clawback Policy As adopted by the Board of Directors on August 10, 2023 Purpose The Board of Directors (the “Board”) of Axcelis Technologies, Inc. (the “Company”) believes that it is in the best interest of the Company and its shareholders to maintain a culture that emphasizes integrity and accountability and that reinforces the Comp

Subsidiaries of the Company. Filed herewith.

Exhibit 21.1 Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2023 Subsidiaries The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1. Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2. Axcelis Technologies GmbH (Germany) 3. Axceli

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2023 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941 AXCELIS TECHNOLOGI

2023 Insider Trading Policy, as adopted by the Board of Directors on August 10, 2023. Filed herewith

‌Exhibit 19.1 Insider Trading Policy Axcelis Technologies, Inc. 108 Cherry Hill Drive Beverly, MA 01915 Company Policy as Dictated by Federal Law There are certain federal laws and regulations that public companies must abide by in order to protect themselves, their employees, and their shareholders. The federal laws prohibiting what is commonly known as “insider trading” are a prime example of su

ACLS / Axcelis Technologies, Inc. / VANGUARD GROUP INC - SCHEDULE 13G/A Passive Investment

SC 13G/A 1 tv0382-axcelistechnologiesin.htm SCHEDULE 13G/A SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 7)* Name of issuer: Axcelis Technologies Inc Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: December 29, 2023 Check the appropriate box t

ACLS / Axcelis Technologies, Inc. / Senvest Management, LLC - AXCELIS TECHNOLOGIES, INC. Passive Investment

SC 13G/A 1 p24-0214sc13ga.htm AXCELIS TECHNOLOGIES, INC. SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 2)* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, par value $0.001 per share (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2023 (Date of Event Which Requires Filing of this State

Axcelis Announces Financial Results for Fourth Quarter and Full Year 2023 Record Revenue for 2023, Achieving Year-Over-Year Growth of 23%

Exhibit 99.1 News Release Axcelis Announces Financial Results for Fourth Quarter and Full Year 2023 Record Revenue for 2023, Achieving Year-Over-Year Growth of 23% BEVERLY, Mass. — Feb. 7, 2024—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter and full year ended December 31, 2023. Highlights include: · Record full year revenue, operating profit and

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 7, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended September 30, 2023 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file numbe

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 1, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

Axcelis Announces Financial Results for Third Quarter 2023 Financial Results Continue to be Driven by Strong Purion Demand in the Global Silicon Carbide Power Device Market

Exhibit 99.1 News Release Axcelis Announces Financial Results for Third Quarter 2023 Financial Results Continue to be Driven by Strong Purion Demand in the Global Silicon Carbide Power Device Market BEVERLY, Mass. — Nov. 1, 2023 — Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the third quarter of 2023. Highlights include: · The Company reported third quarter reven

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): September 5, 2023 Axcelis Technol

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): September 5, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employe

Calculation of Filing Fee Table.

Exhibit 107 Calculation of Filing Fee Tables Form S-3 (Form Type) Axcelis Technologies, Inc.

As filed with the Securities and Exchange Commission on August 3, 2023

TABLE OF CONTENTS As filed with the Securities and Exchange Commission on August 3, 2023 Registration No.

Form of Indenture.

Exhibit 4.1 Axcelis Technologies, Inc. and [ ], as Trustee INDENTURE Dated as of [ , ] TABLE OF CONTENTS Page ARTICLE 1 DEFINITIONS AND INCORPORATION BY REFERENCE 1 1.1 Definitions. 1 1.2 Other Definitions. 5 1.3 Incorporation by Reference of Trust Indenture Act. 6 1.4 Rules of Construction. 6 ARTICLE 2 THE SECURITIES 6 2.1 Issuable in Series. 6 2.2 Establishment of Terms of Series of Securities.

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended June 30, 2023 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 2, 2023 Axcelis Technologi

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 2, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o

Axcelis Announces Financial Results for Second Quarter 2023 Financial Results Exceed Guidance Driven by Strong Purion Demand and Strength in Power Devices

Exhibit 99.1 News Release Axcelis Announces Financial Results for Second Quarter 2023 Financial Results Exceed Guidance Driven by Strong Purion Demand and Strength in Power Devices BEVERLY, Mass. — Aug. 2, 2023 — Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the second quarter of 2023. Highlights include: · The Company reported second quarter revenue of $274.0 mil

Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form.

EX-1.01 2 tm2315965d1ex1-01.htm EXHIBIT 1.01 Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2022 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the “Company”). As noted in the Form SD, 48 suppliers that responded to the Company’s reasonable count

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AXCELIS TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter)

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UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 11, 2023 Axcelis Technologies

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 11, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of

Employment Agreement between the Company and Russell J. Low dated May 11, 2023. Incorporated by reference to Exhibit 10.1 of the Company’s report on Form 8-K filed with the Commission on May 12, 2023

Exhibit 10.1 Exec Copy - conformed AXCELIS TECHNOLOGIES, INC. EMPLOYMENT AGREEMENT [Russell J. Low, Ph.D.] The parties to this Employment Agreement are AXCELIS TECHNOLOGIES, INC., a Delaware corporation (the “Company”), and Russell J. Low, Ph.D., an individual residing in the Commonwealth of Massachusetts (the “Executive”). This Employment Agreement provides for the continued employment of the Exe

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended March 31, 2023 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 00

Axcelis Announces Financial Results for First Quarter 2023 Strength in Silicon Carbide Power Devices and Strong Purion Demand Drives Revenue Growth and Record Backlog

Exhibit 99.1 News Release Axcelis Announces Financial Results for First Quarter 2023 Strength in Silicon Carbide Power Devices and Strong Purion Demand Drives Revenue Growth and Record Backlog BEVERLY, Mass. — May 3, 2023 — Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the first quarter of 2023. Highlights include: · The Company reported first quarter revenue of $

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 3, 2023 Axcelis Technologies,

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 3, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i

2023 Amended and Restated Employment Agreement between the Company and Mary G. Puma dated February 24, 2023. Incorporated by reference to Exhibit 10.1 of the Company’s report on Form 8-K filed with the Commission on April 18, 2023

Exhibit 10.1 Conformed Exec Copy AXCELIS TECHNOLOGIES, INC. 2023 AMENDED AND RESTATED EMPLOYMENT AGREEMENT Mary G. Puma The parties to this 2023 Amended and Restated Employment Agreement, dated as of February 24, 2023 (“Agreement”), are AXCELIS TECHNOLOGIES, INC., a Delaware, USA, corporation (the “Company”), and MARY G. PUMA, an individual residing in the State of New Hampshire, USA (the “Executi

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 24, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employe

ACLS / Axcelis Technologies Inc / VANGUARD GROUP INC - SCHEDULE 13G/A Passive Investment

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 6)* Name of issuer: Axcelis Technologies Inc. Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: March 31, 2023 Check the appropriate box to designate the rule pursuant to which this Schedule is filed

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No.   )

TABLE OF CONTENTS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No.   ) Filed by the Registrant ☐ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (as permitted by Rule

Named Executive Officer Base Compensation at February 15, 2023. Filed herewith.

Exhibit 10.8 Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 15, 2023 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the “Company”) and each of: · the Company’s principal executive officer (Mary G. Puma), · the Company’s principal financial officer (Kevin J. Brewer), and · the three most highl

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2022 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941 AXCELIS TECHNOLOGI

Executive Compensation Clawback Policy, as adopted by the Board of Directors on November 13, 2014. Filed herewith

‌Exhibit 10.15 Axcelis Technologies Inc. Executive Compensation Clawback Policy As adopted by the Board of Directors on November 13, 2014 Definitions For the purposes of this policy, the following definitions apply: ● “Board” shall mean the Board of Directors of the Company, provided that any executive officer serving on the Board of Directors will not participate in any vote relating to a determi

Subsidiaries of the Company. Filed herewith.

Exhibit 21.1 Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2022 Subsidiaries The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1. Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2. Axcelis Technologies GmbH (Germany) 3. Axceli

Non-Employee Director Cash Compensation at February 15, 2023. Filed herewith.

Exhibit 10.9 Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 15, 2023 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non-employee directors. Axcelis provides cash retainers to its non-employee directors, as follows: Annual Cash Retainers, paid quarterly in advance

ACLS / Axcelis Technologies Inc / Senvest Management, LLC - AXCELIS TECHNOLOGIES, INC. Passive Investment

SC 13G/A 1 p23-0626sc13ga.htm AXCELIS TECHNOLOGIES, INC. SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 1)* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, par value $0.001 per share (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2022 (Date of Event Which Requires Filing of this State

ACLS / Axcelis Technologies Inc / VANGUARD GROUP INC - SCHEDULE 13G/A Passive Investment

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 5)* Name of issuer: Axcelis Technologies Inc. Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: December 30, 2022 Check the appropriate box to designate the rule pursuant to which this Schedule is fi

Axcelis Announces Financial Results for Fourth Quarter and Full Year 2022 Achieved Record Annual Revenue, Gross Margin and EPS

Exhibit 99.1 News Release Axcelis Announces Financial Results for Fourth Quarter and Full Year 2022 Achieved Record Annual Revenue, Gross Margin and EPS BEVERLY, Mass. — Feb. 8, 2023—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter and full year ended December 31, 2022. Highlights include: · Record full year revenue, gross margin and EPS, enabling

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 8, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as approved by stockholders on May 14, 2019 and as amended by the Board of Directors on August 11, 2022. Incorporated by reference to Exhibit 10.1 of the Company’s Form 10-Q for the quarter ended September 30, 2022 filed with the Commission on November 3, 2022

? Exhibit 10.1 ? AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for the reverse stock split on June 30, 2016; as amended by the Board of Directors on February 15, 2017 (Stockholder approval not required); as approved by the Stockholders on May 16, 2017; as amended by the Bo

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

Table of Contents ? ? ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2022 System Backlog Continues to Hit Record Levels

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2022 System Backlog Continues to Hit Record Levels BEVERLY, Mass. ? Nov. 2, 2022?Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the third quarter of 2022. Highlights for the third quarter are as follows: ? Revenue for the quarter was $229.2 million, compared to $221.2 million for the se

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 2, 2022 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

ACLS / Axcelis Technologies Inc / Senvest Management, LLC - AXCELIS TECHNOLOGIES, INC. Passive Investment

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. )* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, par value $0.001 per share (Title of Class of Securities) 054540208 (CUSIP Number) October 20, 2022 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuan

ACLS / Axcelis Technologies Inc / PRIMECAP MANAGEMENT CO/CA/ - PRIMECAP MANAGEMENT CO/CA/ Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 10)* Axcelis Technologies, Inc. (Name of Issuer) COM (Title of Class of Securities) 054540208 (CUSIP Number) September 30, 2022 (Date of Event which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Sch

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

Table of Contents ? ? ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.

2022 Amended and Restated Employment Agreement between the Company and Mary G. Puma dated May 24, 2022. Filed herewith.

? Exhibit 10.1 ? AXCELIS TECHNOLOGIES, INC. 2022 AMENDED AND RESTATED EMPLOYMENT AGREEMENT Mary G. Puma ? The parties to this 2022 Amended and Restated Employment Agreement, dated as of May 24, 2022 (?Agreement?), are AXCELIS TECHNOLOGIES, INC., a Delaware, USA, corporation (the ?Company?), and MARY G. PUMA, an individual residing in the State of New Hampshire, USA (the ?Executive?). The Company a

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2022 System Bookings and Backlog Continue to Hit Record Levels

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2022 System Bookings and Backlog Continue to Hit Record Levels BEVERLY, Mass. ? Aug. 3, 2022?Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the second quarter 2022. Highlights for the second quarter are as follows: ? The Company reported second quarter revenue of $221.2 million, compar

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 3, 2022 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AXCELIS TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter)

SD 1 tm2215963d1sd.htm SD OMB APPROVAL OMB Number: 3235-0697 Expires: March 31, 2023 Estimated average burden hours per response....476.12 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AXCELIS TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) Delaware, USA (State or other jurisdiction of incorporation or organi

Exhibit 1.01 — Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form.

Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2021 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the ?Company?). As noted in the Form SD, 70 suppliers that responded to the Company?s reasonable country of origin inquiry survey (representing 24%

Bylaws of the Company, as amended and restated as of May 11, 2022. Incorporated by reference to Exhibit 3.1 of the Company’s Form 8-K filed with the Commission on May 11, 2022

Exhibit 3.1 BY-LAWS OF AXCELIS TECHNOLOGIES, INC. Effective on May 11, 2022 ARTICLE I STOCKHOLDERS SECTION 1.1. Place of Meetings. All meetings of stockholders shall be held at the principal office of the corporation or at such other place as may be named in the notice. SECTION 1.2. Annual Meeting. The annual meeting of stockholders for the election of directors and the transaction of such other b

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Amendments to Articles of Incorporation or Bylaws; Change in Fiscal Year, Financial Statements and Exhibits, Other Events, Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 10, 2022 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of

Bylaws of the Company, as amended as of May 11, 2022. Incorporated by reference to Exhibit 3.2 of the Company’s Form 8-K filed with the SEC on May 11, 2022.

Exhibit 3.2 BY-LAWS OF AXCELIS TECHNOLOGIES, INC. Effective on May 11, 2022 ARTICLE I STOCKHOLDERS SECTION 1.1. Place of Meetings. All meetings of stockholders shall be held at the principal office of the corporation or at such other place as may be named in the notice. SECTION 1.2. Annual Meeting. The annual meeting of stockholders for the election of directors and the transaction of such other b

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

Table of Contents ? ? ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2022 Demand Drives Record Bookings and Backlog, Company Expects to Exceed Revenue of $850 Million in 2022

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2022 Demand Drives Record Bookings and Backlog, Company Expects to Exceed Revenue of $850 Million in 2022 BEVERLY, Mass. ? May 4, 2022?Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the first quarter 2022. Highlights for the first quarter are as follows: ? The Company reported first qua

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 4, 2022 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No.   )

TABLE OF CONTENTS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ??) Filed by the Registrant ? Filed by a Party other than the Registrant ? Check the appropriate box: ? Preliminary Proxy Statement ? Confidential, for Use of the Commission Only (as permitted by Rule

Subsidiaries of the Company. Filed herewith.

Exhibit 21.1 ? Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2021 Subsidiaries The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1. Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2. Axcelis Technologies GmbH (Germany) 3. Axce

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K

? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 ? FORM 10-K ? (Mark One) ? ? ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2021 ? TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 ? ? For the transition period from to ? Commission file number 000-30941 ? AX

Named Executive Officer Base Compensation at February 25, 2022. Filed herewith.

Exhibit 10.8 ? Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 25, 2022 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the ?Company?) and each of: ? the Company?s principal executive officer (Mary G. Puma), ? the Company?s principal financial officer (Kevin J. Brewer), and ? the three most hig

Non-Employee Director Cash Compensation at February 25, 2022. Filed herewith.

Exhibit 10.9 Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 25, 2022 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the ?Company?) and each of its non-employee directors. Axcelis provides cash retainers to its non-employee directors, as follows: ? ? Annual Cash Retainers, paid quarterly in adva

AXCELIS STRENGTHENS ITS BOARD WITH THE ELECTION OF TWO DIRECTORS

Exhibit 99.1 News Release AXCELIS STRENGTHENS ITS BOARD WITH THE ELECTION OF TWO DIRECTORS BEVERLY, Mass., Feb. 23, 2022 - Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that Dipti Vachani and Jeanne Quirk have been elected to the Company?s Board of Directors. ?We are pleased to welcome Dipti and

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 23, 2022 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employe

ACLS / Axcelis Technologies Inc / PRIMECAP MANAGEMENT CO/CA/ - PRIMECAP MANAGEMENT CO/CA/ Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 9)* Axcelis Technologies, Inc. (Name of Issuer) COM (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2021 (Date of Event which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Sched

ACLS / Axcelis Technologies Inc / VANGUARD GROUP INC - SCHEDULE 13G/A Passive Investment

SC 13G/A 1 tv0360-axcelistechnologiesin.htm SCHEDULE 13G/A SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 4)* Name of issuer: Axcelis Technologies Inc. Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: December 31, 2021 Check the appropriate box

ACLS / Axcelis Technologies Inc / Senvest Management, LLC - AXCELIS TECHNOLOGIES, INC. Passive Investment

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 7)* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, $0.001 par value (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2021 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to w

ACLS / Axcelis Technologies Inc / DIMENSIONAL FUND ADVISORS LP - SEC SCHEDULE 13G Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 5 )* Axcelis Technologies Inc (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2021 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which th

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2021 Company Reports Record Full Year Revenue, Gross Margin and Operating Profit

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2021 Company Reports Record Full Year Revenue, Gross Margin and Operating Profit BEVERLY, Mass. ? Feb. 7, 2022 ? Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter and full year ended December 31, 2021. Highlights include: ? Record full year revenue, operat

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 7, 2022 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

Table of Contents ? ? ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 3, 2021 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2021 The Company Reports Record Implant Systems Revenue and Backlog

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2021 The Company Reports Record Implant Systems Revenue and Backlog BEVERLY, Mass. ? November 3, 2021?Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today announced financial results for the third quarter ended September 30, 2021. Hig

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

Table of Contents ? ? ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 4, 2021 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2021 The Company Expects 2021 Revenue to Exceed $625M

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2021 The Company Expects 2021 Revenue to Exceed $625M BEVERLY, Mass. ? August 4, 2021?Axcelis Technologies, Inc. (Nasdaq: ACLS), a lending supplier of enabling ion implantation solutions for the semiconductor industry, today announced financial results for the second quarter ended June 30, 2021. Highlights for the sec

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AXCELIS TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) Delaware, USA (State or other jurisdiction of incorporatio

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Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2020

Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2020 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the ?Company?). As noted in the Form SD, 84 suppliers that responded to the Company?s reasonable country of origin inquiry survey (representing 24%

Other Events, Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 12, 2021 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of

Certification of the Principal Financial Officer pursuant to Section 1350 of Chapter 63 of title 18 of the United States Code (Section 906 of the Sarbanes-Oxley Act), dated May 6, 2021. Filed herewith.

? EXHIBIT 32.2 ? AXCELIS TECHNOLOGIES, INC. Certification of the Principal Financial Officer Pursuant to Section 1350 of Chapter 63 of title 18 of the United States Code ? The undersigned Chief Financial Officer of Axcelis Technologies, Inc., a Delaware corporation, hereby certifies, for the purposes of Section 1350 of Chapter 63 of title 18 of the United States Code (as implemented by Section 906

Quarterly Report - 10-Q

Table of Contents ? ? ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.

Certification of the Principal Executive Officer pursuant to Section 1350 of Chapter 63 of title 18 of the United States Code (Section 906 of the Sarbanes-Oxley Act), dated May 6, 2021. Filed herewith.

? EXHIBIT 32.1 ? AXCELIS TECHNOLOGIES, INC. Certification of the Principal Executive Officer Pursuant to Section 1350 of Chapter 63 of title 18 of the United States Code ? The undersigned Chief Executive Officer of Axcelis Technologies, Inc., a Delaware corporation, hereby certifies, for the purposes of Section 1350 of Chapter 63 of title 18 of the United States Code (as implemented by Section 906

First Amendment to Credit Agreement effective as of March 25, 2021, amending the Senior Secured Credit Facilities Credit Agreement dated as of July 31, 2020 among the Company, the several banks and other financial institutions or entities party thereto, and Silicon Valley Bank. Filed herewith.

Exhibit 10.1 FIRST AMENDMENT TO CREDIT AGREEMENT This First Amendment to Credit Agreement (this ?Amendment?) dated and effective as of March 25, 2021 (the ?First Amendment Effective Date?) by and among AXCELIS TECHNOLOGIES, INC., a Delaware corporation (the ?Borrower?), the several banks and other financial institutions or entities party hereto (the ?Lenders?) and SILICON VALLEY BANK (?SVB?), as t

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 4, 2021 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2021 The Company Expects to Exceed $550M Revenues in 2021

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2021 The Company Expects to Exceed $550M Revenues in 2021 BEVERLY, Mass. ? May 4, 2021?Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the first quarter ended March 31, 2021. Highlights for the first quarter are as follows: ? The Company reported first quarter revenue of $132.8 million,

- DEF 14A

Use these links to rapidly review the document PROXY STATEMENT - TABLE OF CONTENTS Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.

Named Executive Officer Base Compensation at February 26, 2021. Filed herewith.

Exhibit 10.11 ? Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 26, 2021 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the ?Company?) and each of: ? the Company?s principal executive officer (Mary G. Puma), ? the Company?s principal financial officer (Kevin J. Brewer), and ? the three most hi

Subsidiaries of the Company. Filed herewith.

Exhibit 21.1 ? Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2020 Subsidiaries The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1. Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2. Axcelis Technologies GmbH (Germany) 3. Axce

Annual Report - 10-K

? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 ? FORM 10-K ? (Mark One) ? ? ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2020 ? TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 ? ? For the transition period from to ? Commission file number 000-30941 ? AX

Non-Employee Director Cash Compensation at February 26, 2021. Filed herewith.

Exhibit 10.12 Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 26, 2021 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the ?Company?) and each of its non-employee directors. Axcelis provides both cash retainers to its non-employee directors, as follows: ? ? Annual Cash Retainers, paid quarterly i

Axcelis Technologies, Inc.

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 6)* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, $0.001 par value (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2020 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to w

SCHEDULE 13G

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 4 )* Axcelis Technologies Inc (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2020 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which th

SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 8 )* Axcelis Technologies Inc. (Name of Issuer) (Title of Class of Securities) (CUSIP Number) December 31, 2020 (Date of Event Which Requires Filing of this Statement)

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SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 3)*

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 3)* Name of issuer: Axcelis Technologies Inc. Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: December 31, 2020 Check the appropriate box to designate the rule pursuant to which this Schedule is fi

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 10, 2021 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employe

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2020 Full Year 2020 Operating Income Increased 140% on a 38% Increase in Revenue

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2020 Full Year 2020 Operating Income Increased 140% on a 38% Increase in Revenue BEVERLY, Mass. — Feb. 10, 2021—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter and full year ended December 31, 2020. The Company reported fourth quarter revenue of $122.2 m

SCHEDULE 13G

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 4 )* Axcelis Technologies, Inc. (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2020 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which

Senior Secured Credit Facilities Credit Agreement dated as of July 31, 2020, among the Company, as the Borrower, the several lenders from time to time party thereto, and Silicon Valley Bank, as Administrative Agent, Issuing Lender and Swingline Lender, and as Lead Arranger. Incorporated by reference to Exhibit 10.1 of the Company’s Form 10-Q for the quarter ended September 30, 2020 filed with the Commission on November 6, 2020

Exhibit 10.1 Execution Version SENIOR SECURED CREDIT FACILITIES CREDIT AGREEMENT dated as of July 31, 2020, among AXCELIS TECHNOLOGIES, INC., as the Borrower, THE SEVERAL LENDERS FROM TIME TO TIME PARTY HERETO, and SILICON VALLEY BANK, as Administrative Agent, Issuing Lender and Swingline Lender, and as Lead Arranger Table of Contents Page SECTION 1 DEFINITIONS 1 1.1 Defined Terms 1 1.2 Other Defi

Quarterly Report - 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended September 30, 2020 Or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file numbe

Guarantee and Collateral Agreement dated as of July 31, 2020 made by the Company and the other grantors referred to therein in favor of Silicon Valley Bank, as Administrative Agent. Incorporated by reference to Exhibit 10.2 of the Company’s Form 10-Q for the quarter ended September 30, 2020 filed with the Commission on November 6, 2020.

Exhibit 10.2 Execution Version GUARANTEE AND COLLATERAL AGREEMENT Dated as of July 31, 2020 made by AXCELIS TECHNOLOGIES, INC. and the other Grantors referred to herein, in favor of SILICON VALLEY BANK, as Administrative Agent TABLE OF CONTENTS Page SECTION 1. DEFINED TERMS. 1 1.1 Definitions. 1 1.2 Other Definitional Provisions 5 SECTION 2. GUARANTEE. 5 2.1 Guarantee 5 2.2 Right of Contribution 6

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2020 Company Reports Strong Earnings Driven by Robust Gross Margins

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2020 Company Reports Strong Earnings Driven by Robust Gross Margins BEVERLY, Mass. — Nov. 5, 2020—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the third quarter ended September 30, 2020. The Company reported third quarter revenue of $110.4 million, compared to $123 million for the sec

Financial Statements and Exhibits, Results of Operations and Financial Condition - FORM 8-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 5, 2020 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

Quarterly Report - 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended June 30, 2020 Or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2020 Company Reports Strong Financial Performance

Exhibit 99.1 AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2020 Company Reports Strong Financial Performance BEVERLY, Mass. — August 4, 2020—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the second quarter ended June 30, 2020. The Company reported second quarter revenue of $123 million, compared to $119 million for the first quarter of 2020. Operating pro

Entry into a Material Definitive Agreement, Financial Statements and Exhibits, Creation of a Direct Financial Obligation or an Obligation under an Off-Balance Sheet Arrangement of a Registrant, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 31, 2020 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of

- S-3ASR

Use these links to rapidly review the document TABLE OF CONTENTS Table of Contents As filed with the Securities and Exchange Commission on May 29, 2020 Registration No.

Axcelis Technologies, Inc. 2020 Employee Stock Purchase Plan, adopted by the stockholders on May 19, 2020.

Exhibit 99.1 AXCELIS TECHNOLOGIES, INC. 2020 EMPLOYEE STOCK PURCHASE PLAN As adopted by the Board of Directors on August 15, 2019 and by the Stockholders on May 19, 2020 Adopted effective July 1, 2020 1. PURPOSE. The purpose of this Plan is to provide an opportunity for Employees of Axcelis Technologies, Inc. (the "Company") and its Designated Subsidiaries, to purchase Common Stock of the Company

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As filed with the Securities and Exchange Commission on May 29, 2020 REGISTRATION NO.

Form of Indenture.

Exhibit 4.1 Axcelis Technologies, Inc. and [ ], as Trustee INDENTURE Dated as of [ , ] TABLE OF CONTENTS Page ARTICLE 1 DEFINITIONS AND INCORPORATION BY REFERENCE 1 1.1 Definitions. 1 1.2 Other Definitions. 5 1.3 Incorporation by Reference of Trust Indenture Act. 5 1.4 Rules of Construction. 6 ARTICLE 2 THE SECURITIES 6 2.1 Issuable in Series. 6 2.2 Establishment of Terms of Series of Securities.

- SD

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Exhibit 1.01 — Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form

Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2019 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the “Company”). As noted in the Form SD, 70 suppliers that responded to the Company’s reasonable country of origin inquiry survey (representing 20%

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Other Events, Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K/A CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 19, 2020 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Other Events, Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 19, 2020 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of

Quarterly Report - 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended March 31, 2020 Or o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 00

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2020 Company Reports Continued Strong Demand for Purion Products

EX-99.1 2 tm2018531d1ex99-1.htm EXHIBIT 99.1 Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2020 Company Reports Continued Strong Demand for Purion Products BEVERLY, Mass. — May 5, 2020—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the first quarter ended March 31, 2020. The Company reported first quarter revenue of $119 million, c

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 5, 2020 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i

the portions of our definitive Proxy Statement for our Annual Meeting of Stockholders held on May 19, 2020, filed with the SEC on March 30, 2020, that are considered "filed" and not "furnished" under the Exchange Act;

DEF 14A 1 a2240881zdef14a.htm DEF 14A Use these links to rapidly review the document PROXY STATEMENT - TABLE OF CONTENTS Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ý Filed by a Party other than the Registrant o Check t

Description of Securities Registered under Section 12 of the Securities Exchange Act of 1934. Incorporated by reference to Exhibit 4.4 of the Company’s Form 10-K for the year ended December 31, 2019 filed with the Commission on March 2, 2020.

Exhibit 4.4 Axcelis Technologies, Inc. Description of Securities Registered under Section 12 of the Securities Exchange Act of 1934 Our common stock, par value $0.001 per share, stock is the only class of our securities registered under the Exchange Act. We are authorized to issue 75,000,000 shares of common stock. Below is a summary of the material rights of our common stock. This summary is qual

Non‑Employee Director Cash Compensation at March 02, 2020. Filed herewith.

Exhibit 10.12 Axcelis Technologies, Inc. Non‑Employee Director Cash Compensation at March 2, 2020 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non‑employee directors. Axcelis provides both cash retainers to its non‑employee directors, as follows: Annual Cash Retainers, paid quarterly in advanc

Subsidiaries of the Company. Filed herewith.

Exhibit 21.1 Axcelis Technologies, Inc. Exhibit 21.1 to Form 10‑K for the year ended December 31, 2019 Subsidiaries The following is a list of all direct and indirect wholly‑owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1.Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2.Axcelis Technologies GmbH (Germany) 3.Axcelis T

annual report on Form 10-K for the year ended December 31, 2019

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2019 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941 AXCELIS TECHNOLOGI

Named Executive Officer Base Compensation at March 02, 2020. Filed herewith.

Exhibit 10.11 Axcelis Technologies, Inc. Named Executive Officer Base Compensation at March 02, 2020 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the “Company”) and each of:  the Company’s principal executive officer (Mary G. Puma),  the Company’s principal financial officer (Kevin J. Brewer), and  the three most highly

ACLS / Axcelis Technologies, Inc. / PRIMECAP MANAGEMENT CO/CA/ - SC 13G/A Passive Investment

UNITED STATES OMB APPROVAL SECURITIES AND EXCHANGE COMMISSION OMB Number: 3235-0145 Washington, D.

ACLS / Axcelis Technologies, Inc. / DIMENSIONAL FUND ADVISORS LP - SCHEDULE 13G/A Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 3)* AXCELIS TECHNOLOGIES INC (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2019 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which thi

ACLS / Axcelis Technologies, Inc. / VANGUARD GROUP INC - SCHEDULE 13G/A Passive Investment

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 2)* Name of issuer: Axcelis Technologies Inc Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: December 31, 2019 Check the appropriate box to designate the rule pursuant to which this Schedule is fil

ACLS / Axcelis Technologies, Inc. / Senvest Management, LLC - AXCELIS TECHNOLOGIES, INC. Passive Investment

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 5)* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, $0.001 par value (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2019 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to w

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 5, 2020 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2019 Company Reports 94% Increase in Fourth Quarter System Revenues

EX-99.1 2 tm206672d1ex99-1.htm EXHIBIT 99.1 Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2019 Company Reports 94% Increase in Fourth Quarter System Revenues BEVERLY, Mass. — Feb. 5, 2020—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter and full year ended December 31, 2019. The Company reported four

ACLS / Axcelis Technologies, Inc. / Wellington Management Group LLP - SEC SCHEDULE 13G Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 3 )* Axcelis Technologies, Inc. (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2019 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which

Financial Statements and Exhibits, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): December 3, 2019 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

Axcelis Announces Expansion and Extension of Share Repurchase Program

Exhibit 99.1 Axcelis Announces Expansion and Extension of Share Repurchase Program BEVERLY, Mass., Dec. 3, 2019 /PRNewswire/ - Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today announced that its Board of Directors has increased its stock repurchase authorization to $50 million, expanding and extending the $35

ACLS / Axcelis Technologies, Inc. 10-Q - Quarterly Report - 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended September 30, 2019 Or o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file numbe

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2019 Company Introduces Four New Purion Products During the Quarter

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2019 Company Introduces Four New Purion Products During the Quarter BEVERLY, Mass. — Oct. 31, 2019—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the third quarter ended September 30, 2019. The Company reported third quarter revenue of $69.5 million, compared to $74.3 million for the se

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 31, 2019 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

Axcelis Investor Day 2019 The Next Wave of Purion Innovation 1 September 24, 2019

EX-99.1 2 a19-187131ex99d1.htm EX-99.1 Exhibit 99.1 Axcelis Investor Day 2019 The Next Wave of Purion Innovation 1 September 24, 2019 2 expectations for statements management’s are described fer materially ard-looking Safe Harbor Statement This presentation and discussion contain forward-looking statements, including our future revenues, expense reductions, profits, and other results that are forw

Regulation FD Disclosure

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): September 24, 2019 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employ

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 14, 2019 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

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ACLS / Axcelis Technologies, Inc. 10-Q - Quarterly Report - 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended June 30, 2019 Or o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000

Form of Amended and Restated Executive Separation Pay Agreement between the Company and Kevin J. Brewer, William Bintz, John E. Aldeborgh, Russell Low, Lynnette C. Fallon and Douglas Lawson dated May 15, 2019. Incorporated by reference to Exhibit 10.2 of the Company’s Form 10-Q for the quarter ended June 30, 2019 filed with the Commission on August 7, 2019.

Exhibit 10.2 AXCELIS TECHNOLOGIES, INC. AMENDED AND RESTATED EXECUTIVE SEPARATION PAY AGREEMENT THIS AMENDED AND RESTATED EXECUTIVE SEPARATION PAY AGREEMENT, dated as of May 15, 2019, is made by and between Axcelis Technologies, Inc. (the “Company”) and [Kevin J. Brewer, William Bintz, John E. Aldeborgh, Lynnette C. Fallon, Douglas A. Lawson, and Russell J. Low] (the “Executive”). WHERAS, the Comp

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2019 Company Reports Solid Gross Margin Performance and Increases Full Year Gross Margin Estimates

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2019 Company Reports Solid Gross Margin Performance and Increases Full Year Gross Margin Estimates BEVERLY, Mass. — August 6, 2019—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the second quarter ended June 30, 2019. The Company reported second quarter revenue of $74.3 million, compar

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 6, 2019 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o

ACLS / Axcelis Technologies, Inc. SD - - SD

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Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2018

Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2018 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the “Company”). As noted in the Form SD, 45 suppliers that responded to the Company’s reasonable country of origin inquiry survey (representing 16%

Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through May 14, 2019. Filed herewith.

Exhibit 10.1 AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for the reverse stock split on June 30, 2016; as amended by the Board of Directors on February 15, 2017 (Stockholder approval not required); as approved by the Stockholders on May 16, 2017; as amended by the Board

Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as approved by stockholders on May 14, 2019. Incorporated by reference to Exhibit 10.1 of the Company’s Form S-8 registration statement filed with the Commission on May 21, 2019.

As filed with the Securities and Exchange Commission on May 21, 2019 REGISTRATION NO.

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Other Events, Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 14, 2019 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of

ACLS / Axcelis Technologies, Inc. 10-Q Quarterly Report 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended March 31, 2019 Or o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 00

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 7, 2019 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2019 Gross Margins and Expense Management Drive Strong Earnings Performance

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2019 Gross Margins and Expense Management Drive Strong Earnings Performance BEVERLY, Mass. — May 7, 2019—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the first quarter ended March 31, 2019. The Company reported first quarter revenue of $91.5 million, compared to $105.7 million for the

ACLS / Axcelis Technologies, Inc. DEF 14A

DEF 14A 1 a2237891zdef14a.htm DEF 14A Use these links to rapidly review the document PROXY STATEMENT - TABLE OF CONTENTS Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ý Filed by a Party other than the Registrant o Check t

Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through February 5, 2019. Filed herewith.

Exhibit 10.2 AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As amended by the Board of Directors February 5, 2019, with the increase of 3 million shares in stock available for awards in Section 4(a) subject to Stockholder approval As previously approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for the reverse stock split on J

annual report on Form 10-K for the year ended December 31, 2018

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2018 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941 AXCELIS TECHNOLOGI

Subsidiaries of the Company. Filed herewith.

Exhibit 21.1 Axcelis Technologies, Inc. Exhibit 21.1 to Form 10‑K for the year ended December 31, 2018 Subsidiaries The following is a list of all direct and indirect wholly‑owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1.Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2.Axcelis Technologies GmbH (Germany) 3.Axcelis T

Non‑Employee Director Cash Compensation at March 11, 2019. Filed herewith.

Exhibit 10.13 Axcelis Technologies, Inc. Non‑Employee Director Cash Compensation at March 11, 2019 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non‑employee directors. Axcelis provides both cash retainers to its non‑employee directors, as follows: Annual Cash Retainers, paid quarterly in advan

Named Executive Officer Base Compensation at March 11, 2019. Filed herewith.

Exhibit 10.12 Axcelis Technologies, Inc. Named Executive Officer Base Compensation at March 11, 2019 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the “Company”) and each of:  the Company’s principal executive officer (Mary G. Puma),  the Company’s principal financial officer (Kevin J. Brewer), and  the three most highly

ACLS / Axcelis Technologies, Inc. / Wellington Management Group LLP - SEC SCHEDULE 13G Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 2 )* Axcelis Technologies, Inc. (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2018 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which

ACLS / Axcelis Technologies, Inc. / VANGUARD GROUP INC Passive Investment

axcelistechnologiesinc.htm - Generated by SEC Publisher for SEC Filing SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 1 )* Name of issuer: Axcelis Technologies Inc Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: December 31, 2018 Check the appr

ACLS / Axcelis Technologies, Inc. / PRIMECAP MANAGEMENT CO/CA/ - SC 13G/A Passive Investment

UNITED STATES OMB APPROVAL SECURITIES AND EXCHANGE COMMISSION OMB Number: 3235-0145 Washington, D.

ACLS / Axcelis Technologies, Inc. / Senvest Management, LLC - AXCELIS TECHNOLOGIES, INC. Passive Investment

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 4)* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, $0.001 par value (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2018 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to w

ACLS / Axcelis Technologies, Inc. / DIMENSIONAL FUND ADVISORS LP - SCHEDULE 13G/A Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 2)* AXCELIS TECHNOLOGIES INC (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2018 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which thi

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 6, 2019 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2018 Company Reports Growth in Revenues, Gross Margin and Cash

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2018 Company Reports Growth in Revenues, Gross Margin and Cash BEVERLY, Mass. — Feb. 6, 2019—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter ended December 31, 2018. The Company reported fourth quarter revenue of $105.7 million, compared to $95.4 million

ACLS / Axcelis Technologies, Inc. 10-Q (Quarterly Report)

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended September 30, 2018 Or o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file numbe

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2018 Company Reports Solid Gross Margin Performance Across Diverse Customer Base

EX-99.1 2 a18-382181ex99d1.htm EX-99.1 Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2018 Company Reports Solid Gross Margin Performance Across Diverse Customer Base BEVERLY, Mass. — Nov. 1, 2018—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the third quarter ended September 30, 2018. The Company reported third quarter revenue of

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 1, 2018 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

ACLS / Axcelis Technologies, Inc. 10-Q (Quarterly Report)

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended June 30, 2018 Or o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 2, 2018 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2018 Company Reports Accelerated Gross Margin Performance and Remains Confident in Future Growth

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2018 Company Reports Accelerated Gross Margin Performance and Remains Confident in Future Growth BEVERLY, Mass. — August 2, 2018—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the second quarter ended June 30, 2018. The Company reported second quarter revenue of $119.3 million, compare

ACLS / Axcelis Technologies, Inc. / Wellington Management Group LLP - SEC SCHEDULE 13G Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 1 )* Axcelis Technologies, Inc. (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) June 29, 2018 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this

ACLS / Axcelis Technologies, Inc. SD

OMB APPROVAL OMB Number: 3235-0697 Expires: June 30, 2019 Estimated average burden hours per response.

Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2017

EX-1.01 2 a18-141351ex1d01.htm EX-1.01 Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2017 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the “Company”). As noted in the Form SD, 50 suppliers that responded to the Company’s reasonable country of

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Other Events, Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 16, 2018 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of

ACLS / Axcelis Technologies, Inc. 10-Q (Quarterly Report)

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended March 31, 2018 Or o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 00

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 2, 2018 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2018 Q1 Initiatives Open Significant Additional Market Opportunities

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2018 Q1 Initiatives Open Significant Additional Market Opportunities BEVERLY, Mass. — May 2, 2018—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the first quarter ended March 31, 2018. The Company reported first quarter revenue of $122.2 million, compared to $116.4 million for the fourt

ACLS / Axcelis Technologies, Inc. DEF 14A

Use these links to rapidly review the document PROXY STATEMENT - TABLE OF CONTENTS Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.

Subsidiaries of the Company. Filed herewith.

Exhibit 21.1 Axcelis Technologies, Inc. Exhibit 21.1 to Form 10‑K for the year ended December 31, 2017 Subsidiaries The following is a list of all direct and indirect wholly‑owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1.Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2.Axcelis Technologies GmbH (Germany) 3.Axcelis T

Non‑Employee Director Cash Compensation at March 14, 2018. Filed herewith.

Exhibit 10.13 Axcelis Technologies, Inc. Non‑Employee Director Cash Compensation at March 14, 2018 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non‑employee directors. Axcelis provides both cash retainers to its non‑employee directors, as follows: Annual Cash Retainers, paid quarterly in advan

Named Executive Officer Base Compensation at March 14, 2018. Filed herewith.

Exhibit 10.12 Axcelis Technologies, Inc. Named Executive Officer Base Compensation at March 14, 2018 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the “Company”) and each of:  the Company’s principal executive officer (Mary G. Puma),  the Company’s principal financial officer (Kevin J. Brewer), and  the three most highly

ACLS / Axcelis Technologies, Inc. 10-K (Annual Report)

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2017 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941 AXCELIS TECHNOLOGI

Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through February 13, 2018. Filed herewith.

Exhibit 10.2 AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for the reverse stock split on June 30, 2016; as amended by the Board of Directors on February 15, 2017 (Stockholder approval not required); as approved by the Stockholders on May 16, 2017; and as amended by the Bo

ACLS / Axcelis Technologies, Inc. / Senvest Management, LLC Passive Investment

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 3)* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, $0.001 par value (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2017 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to w

ACLS / Axcelis Technologies, Inc. / DIMENSIONAL FUND ADVISORS LP - SCHEDULE 13G/A Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 1)* AXCELIS TECHNOLOGIES INC (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2017 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which thi

ACLS / Axcelis Technologies, Inc. / VANGUARD GROUP INC Passive Investment

axcelistechnologiesinc.htm - Generated by SEC Publisher for SEC Filing SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 0 )* Name of issuer: Axcelis Technologies Inc Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: December 31, 2017 Check the appr

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 6, 2018 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2017 Annual Systems Revenues Increased by 89%; Reversed Deferred Tax Valuation Allowance

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2017 Annual Systems Revenues Increased by 89%; Reversed Deferred Tax Valuation Allowance BEVERLY, Mass. ? February 6, 2018?Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter and full year ended December 31, 2017. The Company reported fourth quarter revenue

ACLS / Axcelis Technologies, Inc. / Wellington Management Group LLP - SEC SCHEDULE 13G Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. )* Axcelis Technologies, Inc. (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) December 29, 2017 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which th

ACLS / Axcelis Technologies, Inc. / PRIMECAP MANAGEMENT CO/CA/ - SC 13G/A Passive Investment

UNITED STATES OMB APPROVAL SECURITIES AND EXCHANGE COMMISSION OMB Number: 3235-0145 Washington, D.

ACLS / Axcelis Technologies, Inc. 10-Q (Quarterly Report)

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended September 30, 2017 Or o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file numbe

Restated Certificate of Incorporation of the Company filed November 2, 2017. Incorporated by reference to Exhibit 3.1 of the Company’s Form 10-Q filed with the Commission on November 3, 2017.

Exhibit 3.1 RESTATED CERTIFICATE OF INCORPORATION OF AXCELIS TECHNOLOGIES, INC. FIRST. The name of the corporation is Axcelis Technologies, Inc. The name under which the corporation was originally incorporated is Eaton Semiconductor Equipment Inc. The Corporation’s original Certificate of Incorporation was filed with the Secretary of State of the State of Delaware on December 21, 1995. SECOND. Thi

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 2, 2017 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2017 Purion Platform Continues to Drive Strong Revenues, Operating Profit and Cash

Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2017 Purion Platform Continues to Drive Strong Revenues, Operating Profit and Cash BEVERLY, Mass. ? Nov. 2, 2017?Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the third quarter ended September 30, 2017. The Company reported third quarter revenue of $104.5 million, compared to $102.8 mi

ACLS / Axcelis Technologies, Inc. ESP

Lynnette C. Fallon Direct Dial: 978-787-4120 [email protected] September 8, 2017 FILED BY EDGAR United States Securities and Exchange Commission Mail Stop 3030 Washington, D.C. 20549 Attn: Amanda Ravitz, Assistant Director, Office of Electronics and Machinery Re: Axcelis Technologies, Inc. Form 10-K for the fiscal year ended December 31, 2016; Filed March 14, 2017 ? No. 000-30941 Dear Si

ACLS / Axcelis Technologies, Inc. 10-Q (Quarterly Report)

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended June 30, 2017 Or o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000

AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for the reverse stock split on June 30, 2016; as amended by the Board of Dire

EX-10.1 2 acls-20170630ex101b791e9.htm EX-10.1 Exhibit 10.1 AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for the reverse stock split on June 30, 2016; as amended by the Board of Directors on February 15, 2017 (Stockholder approval not required); and as approved by the Sto

AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2017 Purion Platform Continues to Drive Strong Growth in Revenues, Operating Profit and Cash

EX-99.1 2 a17-186641ex99d1.htm EX-99.1 Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2017 Purion Platform Continues to Drive Strong Growth in Revenues, Operating Profit and Cash BEVERLY, Mass. — August 3, 2017—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the second quarter ended June 30, 2017. The Company reported second quarter

Axcelis Technologies 8-K (Current Report/Significant Event)

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 3, 2017 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o

Axcelis Technologies S-8

As filed with the Securities and Exchange Commission on May 25, 2017 REGISTRATION NO.

Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2016

EX-1.01 2 a17-138321ex1d01.htm EX-1.01 Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2016 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the “Company”). As noted in the Form SD, 97 suppliers that responded to the Company’s reasonable country of

Axcelis Technologies SD

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Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 16, 2017 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

aclsCurrentFolio10Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.